All Two-Dimensional, Flexible, Transparent, and Thinnest Thin Film Transistor

被引:339
作者
Das, Saptarshi [1 ,2 ]
Gulotty, Richard [1 ,3 ]
Sumant, Anirudha V. [1 ]
Roelofs, Andreas [1 ]
机构
[1] Argonne Natl Lab, Ctr Nanoscale Mat, Argonne, IL 60439 USA
[2] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
[3] Univ Calif Riverside, Mat Sci & Engn Program, Bourns Coll Engn, Riverside, CA 92521 USA
关键词
2D Crystal; graphene; thin film transistor; flexible electronics; FIELD-EFFECT TRANSISTORS; PHOTOLUMINESCENCE; FABRICATION;
D O I
10.1021/nl5009037
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In this article, we report only 10 atomic layer thick, high mobility, transparent thin film transistors (TFTs) with ambipolar device characteristics fabricated on both a conventional silicon platform as well as on a flexible substrate. Monolayer graphene was used as metal electrodes, 3-4 atomic layers of h-BN were used as the gate dielectric, and finally bilayers of WSe2 were used as the semiconducting channel material for the TFTs. The field effect carrier mobility was extracted to be 45 cm(2)/(V s), which exceeds the mobility values of state of the art amorphous silicon based TFTs by similar to 100 times. The active device stack of WSe2-hBN-graphene was found to be more than 88% transparent over the entire visible spectrum and the device characteristics were unaltered for in-plane mechanical strain of up to 2%. The device demonstrated remarkable temperature stability over 77-400 K. Low contact resistance value of 1.4 k Omega-mu m, subthreshold slope of 90 mv/decade, current ON-OFF ratio of 10(7), and presence of both electron and hole conduction were observed in our all two-dimensional (2D) TFTs, which are extremely desirable but rarely reported characteristics of most of the organic and inorganic TFTs. To the best of our knowledge, this is the first report of all 2D transparent TFT fabricated on flexible substrate along with the highest mobility and current ON-OFF ratio.
引用
收藏
页码:2861 / 2866
页数:6
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