Differential interferometry with a complex contrast

被引：36

作者：

Bellon, L ^{[1
]}

Ciliberto, S ^{[1
]}

Boubaker, H ^{[1
]}

Guyon, L ^{[1
]}

机构：

[1] Ecole Normale Super Lyon, CNRS UMR5672, Phys Lab, F-69364 Lyon 07, France

来源：

OPTICS COMMUNICATIONS | 2002年 / 207卷 / 1-6期

关键词：

D O I：

10.1016/S0030-4018(02)01475-X

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10(-13) m/rootHz. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：49 / 56

页数：8

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