Roughness measurements in the picometric range using a polarization interferometer and a multichannel lock-in detection technique

被引：8

作者：

Gleyzes, P ^{[1
]}

Loriette, V ^{[1
]}

Saint-Jalmes, H ^{[1
]}

Boccara, AC ^{[1
]}

机构：

[1] Ecole Super Phys & Chim Ind, Lab Opt, UPR A0005 CNRS, F-75005 Paris, France

来源：

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 1998年 / 38卷 / 5-6期

关键词：

D O I：

10.1016/S0890-6955(97)00122-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：715 / 717

页数：3

共 8 条

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