Micromachined polysilicon microscanners for barcode readers

被引：65

作者：

Kiang, MH ^{[1
]}

Solgaard, O ^{[1
]}

Muller, RS ^{[1
]}

Lau, KY ^{[1
]}

机构：

[1] UNIV CALIF DAVIS, DEPT ELECT & COMP ENGN, DAVIS, CA 95616 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1996年 / 8卷 / 12期

基金：

美国国家科学基金会;

关键词：

Bar codes - Cost effectiveness - Electrooptical devices - Micromachining - Mirrors - Natural frequencies - Semiconductor device manufacture;

D O I：

10.1109/68.544726

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe the design and fabrication of micromachined resonant scanners that have large scan angles at fast scan speeds. Driven by an electrostatic combdrive actuator, these 200 mu m x 250 mu m micromirrors have a maximum scan angle of 28 degrees (optical) at a resonant frequency of 3 kHz when driven by a sinusoidal voltage of 9.5 V (amplitude) superimposed on a 30-V dc bias. Fabricated with a four-layer polysilicon-surface-micromachining process, these resonant scanners are compact, extremely light in weight, potentially very low in cost, and operate at very low power levels. Using the scanner as a laser-beam deflector, we have demonstrated a barcode reader system.

引用

页码：1707 / 1709

页数：3

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