First data from a commercial local electrode atom probe (LEAP)

被引：153

作者：

Kelly, TE ^{[1
]}

Gribb, TT ^{[1
]}

Olson, JD ^{[1
]}

Martens, RL ^{[1
]}

Shepard, JD ^{[1
]}

Wiener, SA ^{[1
]}

Kunicki, TC ^{[1
]}

Ulfig, RM ^{[1
]}

Lenz, DR ^{[1
]}

Strennen, EM ^{[1
]}

Oltman, E ^{[1
]}

Bunton, JH ^{[1
]}

Strait, DR ^{[1
]}

机构：

[1] Imago Sci Instruments Corp, Madison, WI 53719 USA

来源：

MICROSCOPY AND MICROANALYSIS | 2004年 / 10卷 / 03期

关键词：

atom probe; LEAP; local electrode atom probe; microanalysis; nanoscale analysis; 3D imaging;

D O I：

10.1017/S1431927604040565

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The first dedicated local electrode atom probes (LEAP [a trademark of Imago Scientific Instruments Corporation]) have been built and tested as commercial prototypes. Several key performance parameters have been markedly improved relative to conventional three-dimensional atom probe (3DAP) designs. The Imago LEAP can operate at a sustained data collection rate of 1 million atoms/minute. This is some 600 times faster than the next fastest atom probe and large images can be collected in less than 1 h that otherwise would take many days. The field of view of the Imago LEAP is about 40 times larger than conventional 3DAPs. This makes it possible to analyze regions that are about 100 nm diameter by 100 nm deep containing on the order of 50 to 100 million atoms with this instrument. Several example applications that illustrate the advantages of the LEAP for materials analysis are presented.

引用

页码：373 / 383

页数：11

共 26 条

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