Improvement of the mass resolution of the atom probe using a dual counter-electrode

As compared to other techniques, the mass resolution of the 3D atom probe is rather poor. This low mass resolution derives from the spread in energy of field-evaporated ions. In this work, the single counter-electrode used to remove atoms from the specimen was replaced with a dual counter-electrode. A positive standing voltage V-PA is applied on the electrode facing the specimen while the second electrode is grounded. As a result, ions experience a post-acceleration between electrodes that lowers energy deficits of ions resulting in an improvement in the mass resolution. This paper reports the study of the resulting improvement in mass resolution as a function of the post-acceleration voltage. It is also shown that, because of the evaporation pulse, ions also undergo a dynamic post-deceleration in the between electrodes. This post-deceleration contributes to the mass resolution increase. Our results show that this very simple device makes it possible to significantly improve the mass resolution of the atom probe. For a low post-acceleration voltage, the mass resolution is 800 FWHM and 200 at full-width tenth-maximum. (C) 2002 Elsevier Science B.V. All rights reserved.