Effects of deep n-implants on the electrons' transport in silicon drift detectors

被引:17
作者
Castoldi, A [1 ]
Guazzoni, C
Strüder, L
机构
[1] Politecn Milan, Dipartimento Ingn Nucl CeSNEF, I-20133 Milan, Italy
[2] Politecn Milan, Sezione Milano, I-20133 Milan, Italy
[3] Politecn Milan, Dipartimento Elettron & Informazione, I-20133 Milan, Italy
[4] Max Planck Inst, Halbleiterlabor, D-81279 Munich, Germany
关键词
electrons' transport; multilinear silicon drift detectors; position sensing;
D O I
10.1109/TNS.2002.1039613
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A silicon drift detector has been designed to experimentally verify the effects of deep n-implants on the electrons' transport. Regions of deep n-implants have been introduced underneath the p(+) field strips in close proximity to one detector surface. The presence of deep n-implants reduces the amplitude of the potential perturbation that propagates into the semiconductor volume caused by the segmentation of the p(+) strips. As a consequence higher carrier velocities and more insensitivity to surface properties can be obtained with respect to the conventional design (without deep n-implants). This effect is of particular interest when carrier transport must take place at few micrometers from the surface and when position sensing requires the measurement of the drift time. The experimental characterization of the electron velocity as a function of the drift field and the interpretation of the results are reported. At 11 mum from the surface and with a drift field as low as 25 V/cm in presence of deep n-implants we measured an electron velocity of 0.027 cm/mus.
引用
收藏
页码:1055 / 1058
页数:4
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