Thermodynamic modelling of MOCVD of ZrO2 from beta-diketonates and different oxygen sources

被引:10
作者
Fredriksson, E
Forsgren, K
机构
[1] Uppsala University, Department of Inorganic Chemistry, Thin Film and Surf. Chemistry Group
关键词
MOCVD; ZrO2; thermodynamics;
D O I
10.1016/S0257-8972(96)02930-1
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Chemical vapour deposition (CVD) of ZrO2 from three different beta-diketonates - zirconium acetylacetonate, zirconium tetramethylheptanedionate and zirconium trifluoroacetyl-acetonate - is thermodynamically investigated. O-2, H2O and N2O were used as oxygen sources. Both inert and reactive substrates were employed. The effect of different deposition parameters, such as gas phase composition, temperature and pressure, on the extension of the region where pure ZrO2 can be deposited was studied. The results are presented as calculated CVD stability diagrams.
引用
收藏
页码:255 / 263
页数:9
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