共 16 条
[3]
INFRARED-LASER INTERFEROMETRIC THERMOMETRY - A NONINTRUSIVE TECHNIQUE FOR MEASURING SEMICONDUCTOR WAFER TEMPERATURES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1990, 8 (01)
:84-92
[6]
JOHNSON NM, 1987, PHYS REV B, V35, P4166, DOI 10.1103/PhysRevB.35.4166
[7]
JOHNSON NM, 1992, MATER SCI FORUM, V83, P33, DOI 10.4028/www.scientific.net/MSF.83-87.33
[9]
Ruzyllo J., 1990, International Electron Devices Meeting 1990. Technical Digest (Cat. No.90CH2865-4), P409, DOI 10.1109/IEDM.1990.237145
[10]
RUZYLLO J, 1988, MICROCONTAMINATION, V6, P39