The roles of H and O atoms in diamond growth

被引:35
作者
Dementjev, AP
Petukhov, MN
机构
[1] IRTM, RRC Kurchatov Institute, Kurchatov sq., Moscow 123182, Russia
关键词
sp(2); sp(3) bonding; oxygen; hydrogen; electron spectroscopy;
D O I
10.1016/S0925-9635(96)00695-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A chemical interaction of hydrogen and oxygen atoms with a surface of sp(2)-hybridized carbon solids (graphite, soot and C-60) has been studied by XPS and X-ray-excited AES methods. The transition of carbon atoms from the sp(2) state to the sp(3)-hybridized slate has been observed. The measured concentration of the sp(3)-hybridized carbon atoms on the surface is in excess of the C-O bonds concentration. On the basis of these data, the following model of a carbon film growth is proposed: decay of double carbon bonds by H and O atoms and formation of the sp(3)-hybridized C-C, C-H and C-O bonds. It is suggested that one of the key roles of hydrogen and oxygen atoms in the diamond Nm growth is sp(2)-->sp(3) conversion of C-C bonds on a surface under deposition. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:486 / 489
页数:4
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