Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications

被引：27

作者：

Indermuhle, PF

Schurmann, G

Racine, GA

deRooij, NF

机构：

[1] Institute of Microtechnology, University of Neuchâtel, CH-2007 Neuchâtel

[2] Swiss Fed. Institute of Technology, Zürich

[3] Federal Institute of Technology, Lausanne

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 60卷 / 1-3期

关键词：

atomic force microscope; cantilevers; piezoelectric elements;

D O I：

10.1016/S0924-4247(96)01440-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a new process to fabricate arrays of cantilevers with integrated tips for atomic force microscope (AFM) imaging and a piezoelectric layer for vertical actuation and detection. A good homogeneity of the tip shape is obtained thanks to a self-sharpening effect. The cantilevers have been characterized mechanically and electrically.

引用

页码：186 / 190

页数：5

共 9 条

[1]

Brugger J., 1995, 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Digest of Technical Papers (IEEE Cat. No.95TH8173), P636

[2]

Fujii T, 1996, APPL PHYS LETT, V68, P467, DOI 10.1063/1.116415

[3] Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy [J].