Piezoelectric properties of lead zirconate titanate thin films characterized by the pneumatic loading method

被引：21

作者：

Kim, DG ^{[1
]}

Kim, HG ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea

来源：

INTEGRATED FERROELECTRICS | 1999年 / 24卷 / 1-4期

关键词：

piezoelectric coefficient; pneumatic loading method; PZT;

D O I：

10.1080/10584589908215583

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Although there are many studies for the characterization of piezoelectric thin film, it is still strongly needed to develop the easy and practical way to measure the piezoelectricity existing in thin film. Piezoelectric properties of lead zirconate titanate (PZT) thin film were investigated by a new pneumatic loading method, which has been devised as a more reliable and convenient characterization technique. We have observed the aging phenomena and have examined the effects of poling voltage and time on piezoelectric properties of the PZT thin films. There was no built-in piezoelectricity in virgin films.

引用

页码：107 / 119

页数：13

共 14 条

[1]

ETZOLD KF, 1990, MATER RES SOC SYMP P, V200, P297, DOI 10.1557/PROC-200-297

[2] Scanning force microscopy for the study of domain structure in ferroelectric thin films [J].

Gruverman, A ;

Auciello, O ;

Tokumoto, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (02) :602-605

[3] Influence of the processing parameters on the piezoelectric properties of sputtered lead-based ferroelectric thin films [J].

Jaber, B ;

Velu, G ;

Cattan, E ;

Tronc, P ;

Remiens, D ;

Thierry, B .

INTEGRATED FERROELECTRICS, 1997, 17 (1-4) :329-338

[4]

Jaffe B., 1971, PIEZOELECTRIC CERAMI

[5] Interferometric measurements of electric field-induced displacements in piezoelectric thin films [J].

Kholkin, AL ;

Wutchrich, C ;

Taylor, DV ;

Setter, N .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (05) :1935-1941

[6]

KIM DG, 1998, 11 INT S APPL FERR M

[7] MEASUREMENT OF PIEZOELECTRIC COEFFICIENTS OF FERROELECTRIC THIN-FILMS [J].

LEFKI, K ;

DORMANS, GJM .

JOURNAL OF APPLIED PHYSICS, 1994, 76 (03) :1764-1767

[8] PIEZOELECTRIC PROPERTIES OF SOL-GEL-DERIVED FERROELECTRIC AND ANTIFERROELECTRIC THIN-LAYERS [J].

LI, JF ;

VIEHLAND, DD ;

TANI, T ;

LAKEMAN, CDE ;

PAYNE, DA .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (01) :442-448

[9]

MATTIAT OE, 1998, ULTRASONIC TRANSDUCE

[10] Sputtered high Id(31)I coefficient pzt thin film for micro actuators [J].

Sakata, M ;

Wakabayashi, S ;

Goto, H ;

Totani, H ;

Takeuchi, M ;

Yada, T .

NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, :263-266

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