Ablation of wide band-gap materials by multi-wavelength irradiation using a VUV Raman laser

被引：14

作者：

Sugioka, K

Wada, S

Tashiro, H

Toyoda, K

机构：

[1] Inst. of Phys. and Chemical Research, Wako

来源：

APPLIED SURFACE SCIENCE | 1997年 / 109卷

关键词：

D O I：

10.1016/S0169-4332(96)00656-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Ablation of wide band-gap materials such as crystal quartz, sapphire, and lithium niobate by a vacuum-ultraviolet (VUV) Raman laser is demonstrated. Simultaneous irradiation of multi-wavelength beams emitted from the VUV Raman laser realizes high-quality ablation with smooth surface, little thermal influence, and little deposition of debris for all materials. The basic mechanism of high-quality ablation of each material is discussed on the basis of band-gap and lattice energy.

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收藏

页码：179 / 183

页数：5

相关论文

共 7 条

[1] WAVELENGTH CONVERSION OF QUADRUPLED ND-YAG LASER-RADIATION TO THE VACUUM-ULTRAVIOLET BY ANTI-STOKES STIMULATED RAMAN-SCATTERING [J].

MORIWAKI, H ;

WADA, S ;

TASHIRO, H ;

TOYODA, K ;

KASAI, A ;

NAKAMURA, A .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (04) :2175-2179

[2]

Strehlow W. H., 1973, Journal of Physical and Chemical Reference Data, V2, P163, DOI 10.1063/1.3253115

[3] MULTIWAVELENGTH EXCITATION BY VACUUM-ULTRAVIOLET BEAMS COUPLED WITH 4TH-HARMONICS OF A Q-SWITCHED ND-YAG LASER FOR HIGH-QUALITY ABLATION OF FUSED QUARTZ [J].

SUGIOKA, K ;

WADA, S ;

TASHIRO, H ;

TOYODA, K ;

OHNUMA, Y ;

NAKAMURA, A .

APPLIED PHYSICS LETTERS, 1995, 67 (19) :2789-2791

[4] MICROPATTERNING OF QUARTZ SUBSTRATES BY MULTIWAVELENGTH VACUUM-ULTRAVIOLET LASER-ABLATION [J].

SUGIOKA, K ;

WADA, S ;

TSUNEMI, A ;

SAKAI, T ;

TAKAI, H ;

MORIWAKI, H ;

NAKAMURA, A ;

TASHIRO, H ;

TOYODA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (12B) :6185-6189

[5] Multiwavelength irradiation effect in fused quartz ablation using vacuum-ultraviolet Raman laser [J].

Sugioka, K ;

Wada, S ;

Ohnuma, Y ;

Nakamura, A ;

Tashiro, H ;

Toyoda, K .

APPLIED SURFACE SCIENCE, 1996, 96-8 :347-351

[6] NOVEL ABLATION OF FUSED QUARTZ BY PREIRRADIATION OF VACUUM-ULTRAVIOLET LASER-BEAMS FOLLOWED BY 4TH HARMONICS IRRADIATION OF ND-YAG LASER [J].

SUGIOKA, K ;

WADA, S ;

TASHIRO, H ;

TOYODA, K ;

NAKAMURA, A .

APPLIED PHYSICS LETTERS, 1994, 65 (12) :1510-1512

[7]

TOYODA H, 1978, SOLID STATE PHYS, V13, P88