A smart sensor system for carbon monoxide detection

被引:43
作者
Cardinali, GC
Dori, L
Fiorini, M
Sayago, I
Faglia, G
Perego, C
Sberveglieri, G
Liberali, V
Maloberti, F
Tonietto, D
机构
[1] UNIV BRESCIA,INFM,DEPT CHEM & PHYS MAT,I-25133 BRESCIA,ITALY
[2] UNIV PAVIA,DEPT ELECT,I-27100 PAVIA,ITALY
关键词
sensors; sensor interfaces; sigma-delta converters;
D O I
10.1023/A:1008250204824
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
This paper illustrates a smart sensor system for carbon monoxide detection. An innovative technological approach has been pursued to fabricate gas sensors on silicon substrate, compatible with IC fabrication. A mixed analog-digital electronic interface processes the outputs of three sensors to compensate relative humidity and interfering gases. Sigma-delta signal processing and low-frequency noise reduction techniques are used to minimize silicon area and to meet the required performance in a standard CMOS technology.
引用
收藏
页码:275 / 296
页数:22
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