Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopy

被引：35

作者：

Hardy, A. ^{[1
,2
]}

Adelmann, C. ^{[3
]}

Van Elshocht, S. ^{[3
]}

Van den Rul, H. ^{[1
,2
]}

Van Bael, M. K. ^{[1
,2
]}

De Gendt, S. ^{[3
,5
]}

D'Olieslaeger, M. ^{[2
,4
]}

Heyns, M. ^{[3
,5
]}

Kittl, J. A. ^{[3
]}

Mullens, J. ^{[1
]}

机构：

[1] Hasselt Univ, Inorgan & Phys Chem IMO, B-3590 Diepenbeek, Belgium

[2] IMEC VZW, Div IMOMEC, Diepenbeek, Belgium

[3] IMEC VZW, Heverlee, Belgium

[4] Hasselt Univ, Inst Mat Res, B-3590 Diepenbeek, Belgium

[5] Katholieke Univ Leuven, Dept Chem, B-3001 Heverlee, Belgium

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 17期

关键词：

ATR-FTIR; Hafnia; Scandate; Rare earth; High permittivity; LIQUID-INJECTION MOCVD; RARE-EARTH-OXIDES; ATOMIC LAYER DEPOSITION; SILICATE FORMATION; SPECTRA; GROWTH; FILMS; SIO2; DIELECTRICS; ABSORPTION;

D O I：

10.1016/j.apsusc.2009.04.184

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Grazing angle attenuated total reflectance Fourier transform infrared spectroscopy is applied to study ultrathin film Hf4+, Sc3+ and Dy3+ oxides, due to its high surface sensitivity. The (multi) metal oxides studied, are of interest as high-k dielectrics. Important properties affecting the permittivity, such as the amorphous or crystalline phase and interfacial reactions, are characterized. Dy2O3 is prone to silicate formation on SiO2/Si substrates, which is expressed in DyScO3 as well, but suppressed in HfDyOx. Sc2O3, HfScOx and HfO2 were found to be stable in contact with SiO2/Si. Deposition of HfO2 in between Dy2O3 or DyScO3 and SiO2, prevents silicate formation, showing a buffer-like behavior for the HfO2. Doping of HfO2 with Dy or Sc prevents monoclinic phase crystallization. Instead, a cubic phase is obtained, which allows a higher permittivity of the films. The phase remains stable after anneal at high temperature. (c) 2009 Elsevier B.V. All rights reserved.

引用

页码：7812 / 7817

页数：6

共 41 条

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