共 31 条
[31]
[No title captured]
Transmission two-modulator generalized ellipsometry measurements
被引：31
作者：
Jellison, GE
Griffiths, CO
Holcomb, DE
Rouleau, CM
机构：
[1] Oak Ridge Natl Lab, Div Solid State, Oak Ridge, TN 37831 USA
[2] Oak Ridge Natl Lab, Nucl Sci & Technol Div, Oak Ridge, TN 37831 USA
[3] Hinds Instruments Inc, Hillsboro, OR 97124 USA
关键词：
D O I：
10.1364/AO.41.006555
中图分类号：
O43 [光学];
学科分类号：
070207 ;
0803 ;
摘要：
The two-modulator generalized ellipsometer has been used to measure samples in transmission. In this configuration, the instrument can completely characterize a linear diattenuator and retarder, measuring birefringence, diattenuation, the angle of the principal axis, and the sample depolarization simultaneously and accurately. This instrument can be operated in two modes: (1) spectroscopic, in which measurements are made through the entire sample aperture as a function of wavelength, and (2) spatially resolved, in which measurements are made at a single wavelength and a birefringence picture is made of the sample. Current spatially resolved measurements have been made at a resolution of similar to40 mum. Four samples have been examined with this instrument: (1) a mica plate, (2) a Polaroid polarizer, and (3) two quartz plates. (C) 2002 Optical Society of America
引用
收藏
页码：6555 / 6566
页数：12
相关论文