Transmission two-modulator generalized ellipsometry measurements

被引：31

作者：

Jellison, GE

Griffiths, CO

Holcomb, DE

Rouleau, CM

机构：

[1] Oak Ridge Natl Lab, Div Solid State, Oak Ridge, TN 37831 USA

[2] Oak Ridge Natl Lab, Nucl Sci & Technol Div, Oak Ridge, TN 37831 USA

[3] Hinds Instruments Inc, Hillsboro, OR 97124 USA

来源：

APPLIED OPTICS | 2002年 / 41卷 / 31期

关键词：

D O I：

10.1364/AO.41.006555

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The two-modulator generalized ellipsometer has been used to measure samples in transmission. In this configuration, the instrument can completely characterize a linear diattenuator and retarder, measuring birefringence, diattenuation, the angle of the principal axis, and the sample depolarization simultaneously and accurately. This instrument can be operated in two modes: (1) spectroscopic, in which measurements are made through the entire sample aperture as a function of wavelength, and (2) spatially resolved, in which measurements are made at a single wavelength and a birefringence picture is made of the sample. Current spatially resolved measurements have been made at a resolution of similar to40 mum. Four samples have been examined with this instrument: (1) a mica plate, (2) a Polaroid polarizer, and (3) two quartz plates. (C) 2002 Optical Society of America

引用

页码：6555 / 6566

页数：12

共 31 条

[21] SOME ASPECTS OF THE DEVELOPMENT OF SHEET POLARIZERS [J].