Self-aligning gas/liquid micropump

被引：80

作者：

Schabmueller, CGJ ^{[1
]}

Koch, M ^{[1
]}

Mokhtari, ME ^{[1
]}

Evans, AGR ^{[1
]}

Brunnschweiler, A ^{[1
]}

Sehr, H ^{[1
]}

机构：

[1] Univ Southampton, Ctr Microelect, Dept Elect & Comp Sci, Southampton SO17 1BJ, Hants, England

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2002年 / 12卷 / 04期

关键词：

D O I：

10.1088/0960-1317/12/4/313

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper a piezoelectrically driven silicon membrane pump with passive dynamic valves is described, It is designed to pump gases and liquids and to be tolerant to gas bubbles. Reducing the dead volume within the pump, and thus increasing the compression ratio, one achieves the gas pumping. The main advantages and novel features of the pump described in the paper are the self-aligning of the membrane unit to the valve unit and the possibility, of using screen-printed PZT as actuator. which enables mass production and thus low-cost micropumps. A liquid pump rate of 1500 mul min(-1) and a gas pump rate of 690 mul min(-1) were achieved.

引用

页码：420 / 424

页数：5