High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography

被引：24

作者：

Duan, Xuexin ^{[1
]}

Zhao, Yiping ^{[1
,2
]}

Perl, Andras ^{[1
]}

Berenschot, Erwin ^{[2
]}

Reinhoudt, David N. ^{[1
]}

Huskens, Jurriaan ^{[1
]}

机构：

[1] Univ Twente, MESA Inst Nanotechnol, Mol Nanofabricat Grp, NL-7500 AE Enschede, Netherlands

[2] Univ Twente, MESA Inst Nanotechnol, Transducers Sci & Technol Grp, NL-7500 AE Enschede, Netherlands

来源：

ADVANCED MATERIALS | 2009年 / 21卷 / 27期

关键词：

SOFT LITHOGRAPHY; COMPOSITE STAMPS; GOLD; POLY(DIMETHYLSILOXANE); MONOLAYERS; INKS;

D O I：

10.1002/adma.200803809

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Chemically patterned flat stamps provide an effective solution to avoid mechanical stamp-stability problems currently encountered in microcontact printing. A new method is developed to fabricate chemical patterns on a flat PDMS stamp using nanoimprint lithography. Sub-100 nm gold patterns are successfully replicated by these chemically patterned flat PDMS stamps.

引用

页码：2798 / +

页数：6

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