Rutherford backscattering spectroscopy of rough films: Theoretical considerations

被引：25

作者：

Metzner, H

Gossla, M

Hahn, T

机构：

[1] II. Physikalisches Institut, Universität Göttingen

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1997年 / 124卷 / 04期

关键词：

Rutherford backscattering; rough films;

D O I：

10.1016/S0168-583X(97)00092-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present a new approach for the analysis of Rutherford backscattering spectra of rough films. We show, how the height distribution of a rough film on a smooth substrate is related to the backscattering spectrum produced by the film and by the substrate. Using some simplifying assumptions, we calculate complete theoretical spectra which result from various types of idealized height distributions. These include height distributions produced by ''inverted pyramids'', ''pyramids'', and ''spheres''. The Gaussian distribution is also discussed and examples of complete backscattering spectra are presented. The advantages and limitations of the roughness analysis by means of backscattering spectrometry are discussed.

引用

收藏

页码：567 / 574

页数：8

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