A large-aperture, low-resolution quadrupole separator for producing deposited cluster materials

被引:3
作者
Denby, PM [1 ]
Eastham, DA [1 ]
机构
[1] SERC, Daresbury Lab, Synchroton Radiat Dept, CLRC, Warrington WA4 4AD, Cheshire, England
关键词
quadrupole separator; cluster material; resolution;
D O I
10.1016/S0168-9002(99)00993-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A wide-aperture, low-resolution quadrupole separator for metal clusters is described. Its performance has been evaluated by numerical calculations of the trajectories of clusters. Operating in the frequency range from 5 to 100 KHz allows one to separate clusters in the mass range from 30 000 to 300 000 AMU and by suitable choice of the AC and DC voltages one can obtain a resolution of 0.15. At this resolution the transmission of clusters from a source is 100% over the selected mass range. By biasing the quadrupole it has been possible to obtain a very sharp cut-off between the transmitted clusters and those outside the selected range. Trajectory calculation for clusters deposited onto a biased 2 cm diameter substrate show that it is possible to keep the deposition energy below 25 eV for 90% of the clusters when the quadrupole is itself biased. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:588 / 594
页数:7
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