Growth of SrTiO3 thin films on LaAlO3(001) substrates;: the influence of growth temperature on composition, orientation, and surface morphology

被引：9

作者：

Wang, X ^{[1
]}

Olafsson, S ^{[1
]}

Sandström, P ^{[1
]}

Helmersson, U ^{[1
]}

机构：

[1] Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden

来源：

THIN SOLID FILMS | 2000年 / 360卷 / 1-2期

关键词：

dielectrics; oxides; sputtering; surface roughness;

D O I：

10.1016/S0040-6090(99)01099-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

SrTiO3 films have been grown on LaAlO3(001) single crystal substrates using rf-sputtering, The substrates were held at temperatures ranging from 100 to 850 degrees C. For growth temperatures as low as 350 degrees C epitaxial growth is observed. Below 350 degrees C the films are polycrystalline and three different orientations (100), (110), and(111) can be observed using X-ray diffraction. Atomic force microscopy shows that films deposited at temperatures below 350 degrees C and above 650 degrees C are smooth while the surfaces of the films made at intermediate temperatures are rough and faceted. As growth temperatures decrease below 250 degrees C, the films show decreasing amount of Sr. (C) 2000 Elsevier Science S.A. All rights reserved.

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页码：181 / 186

页数：6

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