Crystal growth and conductivity control of group III nitride semiconductors and their application to short wavelength light emitters

被引:648
作者
Akasaki, I
Amano, H
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1997年 / 36卷 / 9A期
关键词
GaN; AlGaN; GaInN; buffer layer; coherent growth; p-type conduction; quantum well structure; LED; laser diode;
D O I
10.1143/JJAP.36.5393
中图分类号
O59 [应用物理学];
学科分类号
摘要
Recent development of technology and understanding of the growth mechanism in heteroepitaxial growth of nitrides on highly-mismatched substrates have enabled us to grow high-quality GaN, AlGaN, GaInN and their quantum well structures. Conductivity control of both n-type and p-type nitrides has also been achieved. These achievements have led to the commercialization of high-brightness blue, green and white Light-emitting diodes and to the realization of short wavelength laser diodes and high-speed transistors based on nitrides. The performance of these devices is still progressing, but still requires advances in many areas of materials science and device fabrication.
引用
收藏
页码:5393 / 5408
页数:16
相关论文
共 94 条
  • [1] STRAINED II-VI QUANTUM-WELL FOR A ROOM-TEMPERATURE BLUE-GREEN LASER
    AHN, D
    YOO, TK
    CHUANG, SL
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1992, 31 (5A): : L556 - L559
  • [2] AKASAKI I, 1995, JPN J APPL PHYS 2, V34, P1517
  • [3] EFFECTS OF AIN BUFFER LAYER ON CRYSTALLOGRAPHIC STRUCTURE AND ON ELECTRICAL AND OPTICAL-PROPERTIES OF GAN AND GA1-XALXN(0-LESS-THAN-X-LESS-THAN-OR-EQUAL-TO-0.4) FILMS GROWN ON SAPPHIRE SUBSTRATE BY MOVPE
    AKASAKI, I
    AMANO, H
    KOIDE, Y
    HIRAMATSU, K
    SAWAKI, N
    [J]. JOURNAL OF CRYSTAL GROWTH, 1989, 98 (1-2) : 209 - 219
  • [4] Shortest wavelength semiconductor laser diode
    Akasaki, I
    Sota, S
    Sakai, H
    Tanaka, T
    Koike, M
    Amano, H
    [J]. ELECTRONICS LETTERS, 1996, 32 (12) : 1105 - 1106
  • [5] AKASAKI I, 1992, MATER RES SOC SYMP P, V242, P383, DOI 10.1557/PROC-242-383
  • [6] CRYSTAL-GROWTH OF COLUMN-III NITRIDES AND THEIR APPLICATIONS TO SHORT-WAVELENGTH LIGHT EMITTERS
    AKASAKI, I
    AMANO, H
    [J]. JOURNAL OF CRYSTAL GROWTH, 1995, 146 (1-4) : 455 - 461
  • [7] Akasaki I., 1994, MATER RES SOC S P, V339, P443
  • [8] AKASAKI I, UNPUB
  • [9] AKASAKI I, 1995, P INT C SIL CARB REL
  • [10] AKASAKI I, 1992, EXT ABSTR INT C SOL