Advancing the hexapole Cs-corrector for the scanning transmission electron microscope

被引：87

作者：

Mueller, Heiko ^{[1
]}

Uhlemann, Stephan ^{[1
]}

Hartel, Peter ^{[1
]}

Haider, Maximilian ^{[1
]}

机构：

[1] Corrected Electron Opt Syst GmbH, D-69126 Heidelberg, Germany

来源：

MICROSCOPY AND MICROANALYSIS | 2006年 / 12卷 / 06期

关键词：

aberration; corrector; STEM; hexapole; monochromator; probe size; resolution;

D O I：

10.1017/S1431927606060600

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Aberration correctors using hexapole fields have proven useful to correct for the spherical aberration in electron microscopy. We investigate the limits of the present design for the hexapole corrector with respect to minimum probe size for the scanning transmission electron microscope and discuss several ways in which the design could be improved by rather small and incremental design changes for the next generation of advanced probe-forming systems equipped with a gun monochromator.

引用

页码：442 / 455

页数：14

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