Disk-shaped bulk micromachined gyroscope with vacuum sealing

被引：19

作者：

Fujita, T ^{[1
]}

Maenaka, K ^{[1
]}

Mizuno, T ^{[1
]}

Matsuoka, T ^{[1
]}

Kojima, T ^{[1
]}

Oshima, T ^{[1
]}

Maeda, M ^{[1
]}

机构：

[1] Himeji Inst Technol, Dept Elect, Himeji, Hyogo 6712201, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 82卷 / 1-3期

关键词：

gyroscope; rate sensor; bulk micromachining; vacuum seal; dual axes; ASIC;

D O I：

10.1016/S0924-4247(99)00370-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present the vacuum-sealed vibrating gyroscope using silicon bulk micromachining technology. The size of the device is 12 x 12 x 1.4 mm(3). Two glass substrates hold the silicon sensing part. The sensing part is encircled with the silicon frame which forms hermetic seal with the glass substrates. From the results of initial testing, we obtain an angular rate detection sensitivity of approximately 8.9 mu V/(degrees s(-1)), a nonlinearity of 1.25% FS and a detection resolution of approximately 0.2 degrees s(-1) at 1 Hz BW. Additionally, we show the detection characteristics of the two orthogonal components of the applied angular rates simultaneously. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：198 / 204

页数：7

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