Commercial vision of silicon-based inertial sensors

被引：19

作者：

Song, C ^{[1
]}

Shinn, M ^{[1
]}

机构：

[1] Samsung Adv Inst Technol, Microsyst Lab, Youngin 449712, Kyounggi Do, South Korea

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 66卷 / 1-3期

关键词：

inertial sensors; commercialization; silicon micromachining; accelerometers; gyroscopes;

D O I：

10.1016/S0924-4247(98)00048-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reviews current technology and market trends in silicon inertial sensors using micromachining technologies. The requirements for successful commercialization of the research results will be discussed. Commercial implantation requires involvement at the design. process, and manufacturing stages, so that low cost, reliability, and better performance can be achieved. It is also necessary to have a clear understanding of the market and IC mentality. The paper also forecasts the potential applications and future market values of silicon-based inertial sensors. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：231 / 236

页数：6

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