An object-oriented framework for modular chemical process simulation with semiconductor processing applications

被引：14

作者：

Chen, Jing

Adomaitis, Raymond A. ^{[1
]}

机构：

[1] Univ Maryland, Dept Chem & Biomol Engn, College Pk, MD 20742 USA

[2] Univ Maryland, Inst Syst Res, College Pk, MD 20742 USA

来源：

COMPUTERS & CHEMICAL ENGINEERING | 2006年 / 30卷 / 09期

基金：

美国国家科学基金会;

关键词：

object-oriented programming; chemical process simulation; semiconductor manufacturing; distributed parameter systems; weighted residual methods;

D O I：

10.1016/j.compchemeng.2006.03.002

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

This paper discusses the development of a set of object-oriented modular simulation tools for solving lumped and spatially distributed models generated from chemical process design and simulation problems. Developed in the context of simulating semiconductor manufacture equipment, this framework reduces the software development cycle time associated with designing process systems and it improves the overall efficiency of the simulator development process. Modularized simulator components can be solved and analyzed individually, as well as formed into modular systems that can be solved using sequential or simultaneous approaches. A tungsten chemical vapor deposition simulation application is presented to illustrate the capability of the proposed tools in facilitating an evolutionary simulation approach. (c) 2006 Elsevier Ltd. All rights reserved.

引用

页码：1354 / 1380

页数：27

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