Growth of amorphous SiO2 nanowires on Si using a Pd/Au thin film as a catalyst

被引:60
作者
Elechiguerra, JL
Manriquez, JA
Yacaman, MJ [1 ]
机构
[1] Univ Texas, Dept Chem Engn, Austin, TX 78712 USA
[2] Univ Texas, Texas Mat Inst, Austin, TX 78712 USA
[3] Ctr Sistemas Integrados Mfg Tecnol Monterrey, Monterrey 64849, NL, Mexico
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2004年 / 79卷 / 03期
关键词
D O I
10.1007/s00339-004-2597-y
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nanowires of amorphous SiO2 were synthesized by thermal processing of a Si(100) substrate at 1100degreesC in the presence of a nitrogen flow, and using a 15 nm thick high silicon-solubility Pd/Au film as a catalyst. The substrate itself was the only source of silicon for the nanowire growth. The nanostructures produced were characterized by high resolution transmission and scanning electron microscopy and by X-ray diffraction. The nanowire growth is consistent with the vapor-liquid-solid (VLS) mechanism, with particles of Pd2Si and Au(Pd) being observed to form from the reaction between silicon and the catalytic film, and to remain at the tip of the wires. The synthesized nanowires showed a well defined morphology which could be very interesting for lasing applications.
引用
收藏
页码:461 / 467
页数:7
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