Two-dimensional modeling of a micro-cell plasma in Xe driven by high frequency

Two-dimensional simulation of a micro-cell plasma driven by high frequency at 13.56 MHz is described in Xe. The minimum sustaining voltage (V-s)(min) in an ideal infinite parallel plates at high frequency is first discussed as a function of both pd and fd (f the applied frequency, d the electrode distance, and p the gas pressure). As decreasing d, (V-s)(min) increases at fixed f, while (V-s)(min) decreases with increasing fd at fixed pd in a high frequency discharge under the condition of a spatial ion trapping. A capability for maintaining a micro-cell plasma is investigated under fd < upsilon(de)/pi for different two-dimensional geometry of the micro cell (upsilon(de) is the effective drift velocity of electrons). The influence of the secondary electron from the electrode becomes important for the maintenance of a microcell plasma and emission efficiency, A powered ring electrode and ground plate system realizes the micro-cell plasma with high density at 13.56 MHz.