We report electron spin resonance (ESR) observation of interface defects at the HfO2/(111)Si boundary for HfO2 films deposited via atomic layer chemical vapor deposition using Hf(NO3)(4) as a precursor. We observe several signals, dominated by one due to a silicon dangling bond at the Si/dielectric interface. This center is somewhat similar to, but not identical to, Si/SiO2 interface silicon dangling bonds. Comparison between ESR and capacitance versus voltage measurements suggests that these dangling bond centers play an important role in HfO2/Si interface traps. (C) 2002 American Institute of Physics.
机构:
FAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USAFAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USA
CAPLAN, PJ
;
POINDEXTER, EH
论文数: 0引用数: 0
h-index: 0
机构:
FAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USAFAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USA
POINDEXTER, EH
;
DEAL, BE
论文数: 0引用数: 0
h-index: 0
机构:
FAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USAFAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USA
DEAL, BE
;
RAZOUK, RR
论文数: 0引用数: 0
h-index: 0
机构:
FAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USAFAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USA
机构:
FAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USAFAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USA
CAPLAN, PJ
;
POINDEXTER, EH
论文数: 0引用数: 0
h-index: 0
机构:
FAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USAFAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USA
POINDEXTER, EH
;
DEAL, BE
论文数: 0引用数: 0
h-index: 0
机构:
FAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USAFAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USA
DEAL, BE
;
RAZOUK, RR
论文数: 0引用数: 0
h-index: 0
机构:
FAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USAFAIRCHILD CAMERA & INSTRUMENT CORP, RES & DEV LAB, PALO ALTO, CA 94304 USA