CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects

The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This ciliary array is composed of an 8 x 8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4 x 9.4 mm, The polyimide-based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of-actuators in this array shows that integration was successful. The array was programmed to do simple linear and diagonal translations and squeeze-, centering-, and rotating-field manipulations. All three tasks were demonstrated using silicon pieces of various shapes and either 0.55 mm or 0.10 mm thick. [365].