Domain and lattice contributions to dielectric and piezoelectric properties of Pb(Zrx,Ti1-x)O3 thin films as a function of composition

被引：82

作者：

Hiboux, S ^{[1
]}

Muralt, P ^{[1
]}

Maeder, T ^{[1
]}

机构：

[1] Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland

来源：

JOURNAL OF MATERIALS RESEARCH | 1999年 / 14卷 / 11期

关键词：

D O I：

10.1557/JMR.1999.0584

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In situ reactively sputter deposited, 300-nm-thick Pb(Zr-x, Ti1-x)O-3 thin films were investigated as a function of composition, texture, and different electrodes (Pt, RuO2). X-ray diffraction analysis, ferroelectric, dielectric, and piezoelectric measurements were carried out. While for dielectric properties bulklike contributions from lattice as well as from domains are observed, domain wall contributions to piezoelectric properties are very much reduced in the morphotropic phase boundary (MPB) region. Permittivity and d(33) do not peak at the same composition; the MPB region is broadened up and generally shifted to the tetragonal side.

引用

页码：4307 / 4318

页数：12

共 31 条

[1] MICROSTRUCTURE AND DOMAIN EFFECTS IN FERROELECTRIC CERAMICS [J].

ARLT, G .

FERROELECTRICS, 1989, 91 :3-7

[2] DIELECTRIC-PROPERTIES OF FINE-GRAINED BARIUM-TITANATE CERAMICS [J].

ARLT, G ;

HENNINGS, D ;

DEWITH, G .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (04) :1619-1625

[3] PIEZOELECTRIC PROPERTIES OF POLYCRYSTALLINE LEAD TITANATE ZIRCONATE COMPOSITIONS [J].

BERLINCOURT, DA ;

CMOLIK, C ;

JAFFE, H .

PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1960, 48 (02) :220-229

[4] THIN-FILMS FOR FERROELECTRIC DEVICES [J].

BRUCHHAUS, R .

FERROELECTRICS, 1992, 133 (1-4) :73-78

[5]

Bruchhaus R., 1992, Integrated Ferroelectrics, V2, P157, DOI 10.1080/10584589208215740

[6] ELECTRICAL AFTEREFFECTS IN PB(TI,ZR)O3 CERAMICS [J].

CARL, K ;

HARDTL, KH .

FERROELECTRICS, 1978, 17 (3-4) :473-486

[7] FERROELECTRIC MEMORIES [J].

DEARAUJO, CAP ;

MCMILLAN, LD ;

MELNICK, BM ;

CUCHIARO, JD ;

SCOTT, JF .

FERROELECTRICS, 1990, 104 :241-256

[8]

Dubois MA, 1998, INTEGR FERROELECTR, V22, P1055

[9]

EREMKIN VV, 1990, FERROELECTRICS, V110, P137

[10] Single-crystal Pb(ZrxTi1-x)O-3 thin films prepared by metal-organic chemical vapor deposition: Systematic compositional variation of electronic and optical properties [J].

Foster, CM ;

Bai, GR ;

Csencsits, R ;

Vetrone, J ;

Jammy, R ;

Wills, LA ;

Carr, E ;

Amano, J .

JOURNAL OF APPLIED PHYSICS, 1997, 81 (05) :2349-2357

← 1 2 3 4 →