Scattering mechanisms limiting two-dimensional electron gas mobility in Al0.25Ga0.75N/GaN modulation-doped field-effect transistors

被引:124
作者
Antoszewski, J [1 ]
Gracey, M
Dell, JM
Faraone, L
Fisher, TA
Parish, G
Wu, YF
Mishra, UK
机构
[1] Univ Western Australia, Dept Elect & Elect Engn, Nedlands, WA 6907, Australia
[2] Univ Calif Santa Barbara, Elect & Comp Engn & Mat Dept, Santa Barbara, CA 93111 USA
关键词
D O I
10.1063/1.372432
中图分类号
O59 [应用物理学];
学科分类号
摘要
In order to characterize the electron transport properties of the two-dimensional electron gas (2DEG) in AlGaN/GaN modulation-doped field-effect transistors, channel magnetoresistance has been measured in the magnetic field range of 0-12 T, the temperature range of 25-300 K, and gate bias range of +0.5 to -2.0 V. By assuming that the 2DEG provides the dominant contribution to the total conductivity, a one-carrier fitting procedure has been applied to extract the electron mobility and carrier sheet density at each particular value of temperature and gate bias. Consequently, the electron mobility versus 2DEG sheet density has been obtained for each measurement temperature. Theoretical analysis of these results suggests that for 2DEG densities below 7x10(12) cm(-2), the electron mobility in these devices is limited by interface charge, whereas for densities above this level, electron mobility is dominated by scattering associated with the AlGaN/GaN interface roughness. (C) 2000 American Institute of Physics. [S0021-8979(00)06805-5].
引用
收藏
页码:3900 / 3904
页数:5
相关论文
共 28 条
[1]   ELECTRONIC-PROPERTIES OF TWO-DIMENSIONAL SYSTEMS [J].
ANDO, T ;
FOWLER, AB ;
STERN, F .
REVIEWS OF MODERN PHYSICS, 1982, 54 (02) :437-672
[2]  
BEENAKKER CWJ, 1991, SOLID STATE PHYSICS, V44
[3]  
Buyanov AV, 1998, MATER RES SOC SYMP P, V482, P585
[4]   CURRENT-VOLTAGE CHARACTERISTICS OF STRAINED PIEZOELECTRIC STRUCTURES [J].
BYKHOVSKI, A ;
GELMONT, B ;
SHUR, M ;
KHAN, A .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (04) :1616-1620
[5]  
Bykhovski AD, 1996, APPL PHYS LETT, V68, P818, DOI 10.1063/1.116543
[6]   Magnetic field dependent Hall data analysis of electron transport in modulation-doped AlGaN/GaN heterostructures [J].
Dziuba, Z ;
Antoszewski, J ;
Dell, JM ;
Faraone, L ;
Kozodoy, P ;
Keller, S ;
Keller, B ;
DenBaars, SP ;
Mishra, UK .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (06) :2996-3002
[7]   Electron transport in AlGaN-GaN heterostructures grown on 6H-SiC substrates [J].
Gaska, R ;
Yang, JW ;
Osinsky, A ;
Chen, Q ;
Khan, MA ;
Orlov, AO ;
Snider, GL ;
Shur, MS .
APPLIED PHYSICS LETTERS, 1998, 72 (06) :707-709
[8]   MOBILITY OF THE TWO-DIMENSIONAL ELECTRON-GAS AT SELECTIVITY DOPED N-TYPE ALXGA1-XAS/GAAS HETEROJUNCTIONS WITH CONTROLLED ELECTRON CONCENTRATIONS [J].
HIRAKAWA, K ;
SAKAKI, H .
PHYSICAL REVIEW B, 1986, 33 (12) :8291-8303
[9]   Electron mobility in AlxGa1-xN/GaN heterostructures [J].
Hsu, L ;
Walukiewicz, W .
PHYSICAL REVIEW B, 1997, 56 (03) :1520-1528
[10]   GIANT NEGATIVE MAGNETORESISTANCE OF A DEGENERATE 2-DIMENSIONAL ELECTRON-GAS IN THE VARIABLE-RANGE-HOPPING REGIME [J].
JIANG, HW ;
JOHNSON, CE ;
WANG, KL .
PHYSICAL REVIEW B, 1992, 46 (19) :12830-12833