Spherical carbon particle growth in a methane plasma

被引：16

作者：

Shoji, Fumiya ^{[1
]}

Feng, Zongbao ^{[1
]}

Kono, Akihiko ^{[1
]}

Nagai, Tatsuzo ^{[1
]}

机构：

[1] Kyushu Kyoritsu Univ, Grad Sch Engn, Kitakyushu, Fukuoka 8078585, Japan

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 17期

关键词：

D O I：

10.1063/1.2369947

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

There is strong evidence that the spherical carbon particles composed of graphite carbon onions of ca. 10 nm are grown to micron size under the conditions of a heated Si (100) substrate surface exposed to irradiation by a CH4/Ar plasma. Furthermore, it is described that these carbon particles of micron size are spherically grown in the plasma and then fall to the substrate surface. (c) 2006 American Institute of Physics.

引用

页数：3

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