共 33 条
- [1] ETCHING OF INDIUM TIN OXIDE IN METHANE/HYDROGEN PLASMAS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3551 - 3554
- [3] EFFECT OF CL2 ADDITIONS TO AN ARGON GLOW-DISCHARGE [J]. JOURNAL OF APPLIED PHYSICS, 1994, 75 (04) : 1931 - 1939
- [6] PLASMA-ETCHING OF SNO2 FILMS ON SILICON SUBSTRATES [J]. THIN SOLID FILMS, 1980, 73 (02) : L5 - L6
- [7] REACTIVE ION ETCHING OF INDIUM-TIN-OXIDE FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (06) : 1839 - 1840
- [8] *CHEM RUBB OH, 1972, HDB CHEM PHYS
- [9] INFLUENCE OF THE SURFACE RECONSTRUCTION ON THE WORK FUNCTION AND SURFACE CONDUCTANCE OF (110)SNO2 [J]. APPLICATIONS OF SURFACE SCIENCE, 1982, 11-2 (JUL): : 637 - 651
- [10] SURFACE-CHEMISTRY OF TIN OXIDE-BASED GAS SENSORS [J]. JOURNAL OF APPLIED PHYSICS, 1994, 76 (08) : 4467 - 4471