共 24 条
[2]
Tunable liquid-filled microlens array integrated with microfluidic network
[J].
OPTICS EXPRESS,
2003, 11 (19)
:2370-2378
[8]
Improved patterning quality of SU-8 microstructures by optimizing the exposure parameters
[J].
ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XVII, PTS 1 AND 2,
2000, 3999
:1019-1027