Optical characteristics of (La, Ce)B6 films deposited on silicon substrates by e-beam evaporation process

被引：18

作者：

Kafadaryan, EA ^{[1
]}

Petrosyan, SI ^{[1
]}

Badalyan, GR ^{[1
]}

Harutyunyan, SR ^{[1
]}

Kuzanyan, AS ^{[1
]}

机构：

[1] NASA, Inst Phys Res, Ashtarak 378410 2, Armenia

来源：

THIN SOLID FILMS | 2002年 / 416卷 / 1-2期

关键词：

optical spectroscopy; conductivity; borides;

D O I：

10.1016/S0040-6090(02)00716-2

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

Oriented (100) polycrystalline thin films of (La, Ce)B-6 with 1 at.% Ce have been deposited on (111) silicon substrates at different substrate temperatures between 600 and 860 degreesC by electron-beam evaporation. Optical reflectivity, X-ray diffraction and electrical resistivity have been systematically studied. The effective optical constants (epsilon, sigma, -Im epsilon(-1), omega(p)) of the (La, Ce)B-6 films are calculated by Kramers-Kronig transformation of the reflectivity spectra and analyzed by a modified Drude model. The results show that the electronic and optical parameters of (La, Ce)B,, films depend on substrate deposition temperature and substrate material. These effects are discussed. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：218 / 223

页数：6

共 15 条

[1]

NEW METHOD FOR MELTING AND RECRYSTALLIZATION OF LANTHANUM HEXABORIDE (LAB6) FOR PREPARING FIELD EMITTERS [J].