Releasing SU-8 structures using polystyrene as a sacrificial material

被引：54

作者：

Luo, C

Govindaraju, A

Garra, J

Schneider, T

White, R

Currie, J

Paranjape, M

机构：

[1] Louisiana Tech Univ, Dept Biomed Engn, Ruston, LA 71272 USA

[2] Louisiana Tech Univ, Inst Micromfg, Ruston, LA 71272 USA

[3] Louisiana Tech Univ, Dept Elect Engn, Ruston, LA 71272 USA

[4] Georgetown Univ, Georgetown Adv Elect Lab, Dept Phys, Washington, DC 20057 USA

[5] Sci Applicat Int Corp, Mclean, VA 22102 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 114卷 / 01期

关键词：

releasing; SU-8; structures; polystyrene;

D O I：

10.1016/j.sna.2004.02.042

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have successfully developed a new method to release SU-8 structures with polystyrene as a sacrificial material. Toluene is initially used to dissolve solid polystyrene, and the resulting solution is employed to spin coat a sacrificial polystyrene layer onto a glass plate prior to SU-8 deposition. Toluene is used again at the end of the process to sacrificially etch the polystyrene layer to release the cured SU-8 structures. Toluene has no effect on the cured SU-8, even with significant over-etch times, and the dissolution and etch rates are relatively fast. Using this method, we have successfully released SU-8 membranes of an area of 50 cm(2). (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：123 / 128

页数：6

共 13 条

[11]

SENTURIA SD, 2001, MICROSYSTEM DESIGN, P220

[12] Flexible low-voltage electro-optic polymer modulators [J].