Temperature-dependent study of n-ZnO/p-GaN diodes

被引:16
作者
Hsueh, Kuang-Po [1 ]
Huang, Shou-Chien
Li, Ching-Tai
Hsin, Yue-Ming
Sheu, Jinn-Kong
Lai, Wei-Chih
Tun, Chun-Ju
机构
[1] Natl Cent Univ, Dept Elect Engn, Chungli 32054, Taiwan
[2] Natl Cheng Kung Univ, Inst Electroopt Sci & Engn, Tainan 70101, Taiwan
[3] Natl Synchroton Radiat Res Ctr, Hsinchu 30076, Taiwan
关键词
Annealing - Current voltage characteristics - Gallium nitride - Sensitivity analysis - Substrates - Zinc oxide;
D O I
10.1063/1.2716324
中图分类号
O59 [应用物理学];
学科分类号
摘要
This work investigates the temperature dependence of the current-voltage (I-V) characteristics of n-ZnO/p-GaN junction diodes. The n-ZnO films were deposited on top of the p-GaN by dc sputtering with subsequent annealings at 500, 600, 700, and 800 degrees C for 60 s. The Hall measurement and the x-ray diffraction pattern are measured to study the n-ZnO films. The temperature sensitivity coefficients of the I-V characterizations are obtained by different substrate temperatures (25, 50, 100, and 150 degrees C) and the extracted values are 2.10, 1.93, 3.22, and 1.36 mV/degrees C in the forward bias and 8.7, 8.0, 4.6, and 2.3 mV/degrees C in the reverse bias, respectively. The fabricated n-ZnO/p-GaN diode with ZnO annealing temperatures at 800 degrees C demonstrates the lowest temperature dependence. (c) 2007 American Institute of Physics.
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页数:3
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