Combinatorial synthesis and evaluation of functional inorganic materials using thin-film techniques

被引：71

作者：

Takeuchi, I ^{[1
]}

van Dover, RB

Koinuma, H

机构：

[1] Univ Maryland, Dept Mat Sci & Engn, College Pk, MD 20742 USA

[2] Univ Maryland, Ctr Superconduct Res, College Pk, MD 20742 USA

[3] Tokyo Inst Technol, Frontier Collaborat Res Ctr, Tokyo, Japan

[4] Tokyo Inst Technol, Mat & Struct Lab, Tokyo, Japan

来源：

MRS BULLETIN | 2002年 / 27卷 / 04期

关键词：

advanced dielectrics; combinatorial methods; composition spreads; concurrent x-ray diffractometer; thin films; laser molecular-beam epitaxy; scanning evanescent microwave probe; transparent magnetic materials;

D O I：

10.1557/mrs2002.97

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Novel phases of functional inorganic chemical systems can be efficiently explored using high-throughput thin-film fabrication techniques coupled with rapid characterization schemes. High-throughput investigation of thin-film materials has already led to the discovery of new dielectric and magnetic materials. In this article, we review various high-throughput thin-film synthesis/evaluation techniques and discuss examples of exciting discoveries and new applications of combinatorial techniques.

引用

页码：301 / 308

页数：8

共 26 条

[1] A CLASS OF COBALT OXIDE MAGNETORESISTANCE MATERIALS DISCOVERED WITH COMBINATORIAL SYNTHESIS [J].

BRICENO, G ;

CHANG, HY ;

SUN, XD ;

SCHULTZ, PG ;

XIANG, XD .

SCIENCE, 1995, 270 (5234) :273-275

[2] A low-loss composition region identified from a thin-film composition spread of (Ba1-x-ySrxCay) TiO3 [J].

Chang, H ;

Takeuchi, I ;

Xiang, XD .

APPLIED PHYSICS LETTERS, 1999, 74 (08) :1165-1167

[3] Combinatorial synthesis and high throughput evaluation of ferroelectric/dielectric thin-film libraries for microwave applications [J].

Chang, H ;

Gao, C ;

Takeuchi, I ;

Yoo, Y ;

Wang, J ;

Schultz, PG ;

Xiang, XD ;

Sharma, RP ;

Downes, M ;

Venkatesan, T .

APPLIED PHYSICS LETTERS, 1998, 72 (17) :2185-2187

[4] Multimode quantitative scanning microwave microscopy of in situ grown epitaxial Ba1-xSrxTiO3 composition spreads [J].

Chang, KS ;

Aronova, M ;

Famodu, O ;

Takeuchi, I ;

Lofland, SE ;

Hattrick-Simpers, J ;

Chang, H .

APPLIED PHYSICS LETTERS, 2001, 79 (26) :4411-4413

[5]

Chang WT, 1999, MATER RES SOC SYMP P, V541, P699

[6] Quantitative microwave near-field microscopy of dielectric properties [J].

Gao, C ;

Xiang, XD .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (11) :3846-3851

[7] Thermodynamic stability of binary oxides in contact with silicon [J].

Hubbard, KJ ;

Schlom, DG .

JOURNAL OF MATERIALS RESEARCH, 1996, 11 (11) :2757-2776

[8] Synchrotron x-ray microbeam diagnostics of combinatorial synthesis [J].

Isaacs, ED ;

Marcus, M ;

Aeppli, G ;

Xiang, XD ;

Sun, XD ;

Schultz, P ;

Kao, HK ;

Cargill, GS ;

Haushalter, R .

APPLIED PHYSICS LETTERS, 1998, 73 (13) :1820-1822

[9] ATOMIC CONTROL OF THE SRTIO3 CRYSTAL-SURFACE [J].

KAWASAKI, M ;

TAKAHASHI, K ;

MAEDA, T ;

TSUCHIYA, R ;

SHINOHARA, M ;

ISHIYAMA, O ;

YONEZAWA, T ;

YOSHIMOTO, M ;

KOINUMA, H .

SCIENCE, 1994, 266 (5190) :1540-1542

[10]

Koinuma H, 1999, APPL PHYS A-MATER, V69, pS29, DOI 10.1007/s003390051350

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