Flexible TFTs based on solution-processed ZnO nanoparticles

被引:74
作者
Jun, Jin Hyung [1 ]
Park, Byoungjun
Cho, Kyoungah
Kim, Sangsig
机构
[1] Korea Univ, Dept Elect Engn, Seoul 136701, South Korea
关键词
FIELD-EFFECT TRANSISTORS; THIN-FILM-TRANSISTOR; SEMICONDUCTORS; FABRICATION;
D O I
10.1088/0957-4484/20/50/505201
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Flexible attention in recent years. In particular, solution processes have been spotlighted in the field of flexible electronics, since they provide the opportunity to fabricate flexible electronics using low-temperature processes at low-cost with high throughput. However, there are few reports which describe the characteristics of electronic devices on flexible substrates. In this study, we fabricated flexible thin-film transistors (TFTs) on plastic substrates with channel layers formed by the spin-coating of ZnO nanoparticles and investigated their electrical properties in the flat and bent states. To the best of our knowledge, this study is the first attempt to fabricate fully functional ZnO TFTs on flexible substrates through the solution process. The ZnO TFTs showed n-channel device characteristics and operated in enhancement mode. In the flat state, a representative ZnO TFT presented a very low field-effect mobility of 1.2 x 10(-5) cm(2) V-1 s(-1), while its on/off ratio was as high as 1.5 x 10(3). When the TFT was in the bent state, some of the device parameters changed. The changes of the device parameters and the possible reasons for these changes will be described. The recovery characteristics of the TFTs after being subjected to cyclic bending will be discussed as well.
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页数:6
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