Synthesis and electron field emission of nanocrystalline diamond thin films grown from N-2/CH4 microwave plasmas

Nanocrystalline diamond films have been synthesized by microwave plasma enhanced chemical vapor deposition using N-2/CH4 as the reactant gas without additional H-2. The nanocrystalline diamond phase has been identified by x-ray diffraction and transmission electron microscopy analyses. High resolution secondary ion mass spectroscopy has been employed to measure incorporated nitrogen concentrations up to 8 X 10(20) atoms/cm(3). Electron field emission measurements give an onset field as low as 3.2 V/mu m. The effect of the incorporated nitrogen on the field emission characteristics of the nanocrystalline films is discussed. (C) 1997 American Institute of Physics. [S0021-8979(97)02821-1].