Influence of growth temperature on the micro crystallinity and native defect structure of hydrogenated amorphous silicon

The microstructure of hydrogenated amorphous silicon grown by hot-wire chemical vapour deposition (HW-CVD) on glass substrates, at different substrate temperatures ranging from 300 to 500 degreesC, has been studied using X-ray diffraction and positron annihilation techniques. In previous studies it has been shown that recrystallization is accompanied by a relaxation of the defect structure with an increase in the free volume at the positron annihilation site. The object of this work is to relate the initial defect configuration to the degree of order in the structure, which has been characterized through its radial density function giving accurate estimates of the nearest-neighbour separation and bond angles. (C) 2002 Elsevier Science B.V. All rights reserved.