Tradeoffs in micro-opto-electro-mechanical system materials

被引：5

作者：

Cabuz, C

机构：

[1] Honeywell Technology Center, Plymouth, MN 55441

[2] Tohoku University, Sendai

[3] Honeywell Technology Center, Minneapolis

来源：

OPTICAL ENGINEERING | 1997年 / 36卷 / 05期

关键词：

micro-opto-electro-mechanical systems; materials; resonators; electrostatic actuators; p + silicon; dielectric;

D O I：

10.1117/1.601330

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

To build three-dimensional micro-opto-electro-mechanical systems (MOEMS), new materials have to be designed. However, increased manufacturability results generally in modified/degraded optical, mechanical, and electrical characteristics. The paper presents a detailed analysis of p + silicon as an opto-electro-mechanical material for microresonators, and gives some hints on the problems associated with the use of low-temperature dielectric in electrostatic microactuators. All the relevant parameters of p + silicon are experimentally determined and process recommendations allowing improved quality are formulated. Charge injection and trapping in low-temperature dielectric are analyzed and their impact on the behavior of the electrostatic actuators evaluated. (C) 1997 Society of Photo-Optical Instrumentation Engineers.

引用

页码：1298 / 1306

页数：9

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