Micromachined AlGaAs/GaAs vertical cavity filter with adjustable temperature dependence and wavelength trimming ability

被引：18

作者：

Amano, T ^{[1
]}

Koyama, F ^{[1
]}

Furukawa, N ^{[1
]}

Nishiyama, N ^{[1
]}

Matsutani, A ^{[1
]}

Iga, K ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan

来源：

ELECTRONICS LETTERS | 2000年 / 36卷 / 01期

关键词：

D O I：

10.1049/el:20000123

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors present a novel micromachined vertical cavity filter which has an AlGaAs/GaAs distributed Bragg reflector (DBR), that can be mechanically tuned by differential thermal expansion. The strain-induced displacement of one of the mirrors potentially enables wavelength tuning and trimming to be tarried out with an adjustable temperature dependence. A negative temperature coefficient has been achieved in a micromachined semiconductor filter for the first time, demonstrating the possibility of temperature insensitive operation Also, wavelength trimming of > 20 nm was demonstrated after completion of the device fabrication.

引用

页码：74 / 76

页数：3

共 5 条

[1]

KOYAMA F, 1997, OSA TECHNICAL DIGEST, V9, P90

[2] VERTICAL COUPLED-CAVITY MICROINTERFEROMETER ON GAAS WITH DEFORMABLE-MEMBRANE TOP MIRROR [J].