Improved stability of hydrogenated amorphous-silicon photosensitivity by ultraviolet illumination

被引:7
作者
Branz, HM [1 ]
Xu, YQ [1 ]
Heck, S [1 ]
Gao, W [1 ]
机构
[1] Natl Renewable Energy Lab, Golden, CO 80401 USA
关键词
D O I
10.1063/1.1518566
中图分类号
O59 [应用物理学];
学科分类号
摘要
Postdeposition ultraviolet (UV) illumination, followed by etching, improves the stability of hydrogenated amorphous-silicon thin films against subsequent light-induced degradation of photosensitivity. The etch removes a heavily damaged layer extending about 100 nm below the surface, but beneath the damage, the UV has improved the stability of 200 to 300 nm of bulk film. The open-circuit voltage of Schottky solar cells is also stabilized by UV-etch treatment. Possible mechanisms are discussed. (C) 2002 American Institute of Physics.
引用
收藏
页码:3353 / 3355
页数:3
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