Surface morphology of metal films deposited on mica at various temperatures observed by atomic force microscopy

被引:42
作者
Higo, M [1 ]
Fujita, K [1 ]
Tanaka, Y [1 ]
Mitsushio, M [1 ]
Yoshidome, T [1 ]
机构
[1] Kagoshima Univ, Fac Engn, Dept Appl Chem & Chem Engn, Kagoshima 8900065, Japan
关键词
thermal evaporation; metal films; surface morphology; atomic force microscopy; structure zone model;
D O I
10.1016/j.apsusc.2005.07.034
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Thin films of eight metals with a thickness of 150 mn were deposited on mica substrates by thermal evaporation at various temperatures in a high vacuum. The surface morphology of the metal films was observed by atomic force microscopy (AFM) and the images were characterized quantitatively by a roughness analysis and a bearing analysis (surface height analysis). The films of Au, Ag, Cu, and Al with the high melting points were prepared at homologous temperatures T/T-m, = 0.22-0.32, 0.40, and 0.56. The films of In, Sn, Bi, and Pb with the low melting points were prepared at T/T-m, = 0.55-0.70, where T and T-m are the absolute temperatures of the mica substrate and the melting point of the metal, respectively. The surface morphology of these metal films was studied based on a structure zone model. The film surfaces of Au, Ag, and Cu prepared at the low temperatures (T/T-m = 0.22-0.24) consist of small round grains with diameters of 30-60 nm and heights of 2-7 nm. The surface heights of these metal films distribute randomly around the surface height at 0 nm and the morphology is caused by self-shadowing during the deposition. The grain size becomes large due to surface diffusion of adatoms and the film surfaces have individual characteristic morphology and roughnesses as T increases. The surface of the Al film becomes very smooth as T increases and the atomically smooth surface is obtained at T/T-m = 0.56-0.67 (250-350 degrees C). On the other hand, the atomically smooth surface of the An film is obtained at T/T-m = 0.56 (473 3 degrees C). The films of In, Sn, Bi, and Pb prepared at T/T-m = 0.55-0.70 also show the individual characteristic surface morphology. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:5083 / 5099
页数:17
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