Large-area synthesis of carbon nanofibers by low-power microwave plasma-assisted CVD

被引：18

作者：

Zhong, GF ^{[1
]}

Tachiki, M ^{[1
]}

Umezawa, H ^{[1
]}

Fujisaki, T ^{[1
]}

Kawarada, H ^{[1
]}

Ohdomari, I ^{[1
]}

机构：

[1] Waseda Univ, Sch Sci & Engn, Tokyo 1698555, Japan

来源：

CHEMICAL VAPOR DEPOSITION | 2004年 / 10卷 / 03期

关键词：

D O I：

10.1002/cvde.200304168

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Communication: Novel antenna edge microwave plasma CVD (AE-MPCVD) is used for the first time to grow CNFs (carbon nanofibers). The synthesis of CNFs on large-area substrates with high growth reproducibility is reported at low microwave power input and with remote deposition. A Growth area ten times as large as the plasma size generated is achieved by AE-MPCVD. Because of its structural simplicity, AE-MPCVD systems can easily be scaled up by applying multi-antenna edge arrays without considering complex microwave geometry or cavity and the total growth area and quality of CNFs are thus expected to be greatly improved.

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页码：125 / +

页数：5

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