Indium segregation in InGaN quantum-well structures

被引:113
作者
Duxbury, N
Bangert, U
Dawson, P
Thrush, EJ
Van der Stricht, W
Jacobs, K
Moerman, I
机构
[1] UMIST, Dept Phys, Manchester M60 1QD, Lancs, England
[2] Thomas Swan & Co Ltd, Sci Equipment Div, Unit Button End 1C, Cambridge CB2 5NX, England
[3] State Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium
关键词
D O I
10.1063/1.126108
中图分类号
O59 [应用物理学];
学科分类号
摘要
Direct evidence for In-segregation in InGaN/GaN quantum-well structures is given via highly spatially resolved energy dispersive x-ray analysis performed in a dedicated scanning transmission electron microscope. The In fluctuations become increasingly pronounced in the vicinity of dislocations. The latter assist In diffusion and cause severe Ga/In intermixing. (C) 2000 American Institute of Physics. [S0003-6951(00)00911-6].
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页码:1600 / 1602
页数:3
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