A Large Area Flexible Array Sensors Using Screen Printing Technology

被引:77
作者
Chang, Wen-Yang [1 ,3 ]
Fang, Te-Hua [2 ]
Lin, Heng-Ju [3 ]
Shen, Yu-Tang [3 ]
Lin, Yu-Cheng [1 ]
机构
[1] Natl Cheng Kung Univ, Dept Engn Sci, Tainan 701, Taiwan
[2] Natl Formosa Univ, Inst Mech & Electromech Engn, Yunlin 632, Taiwan
[3] Ind Technol Res Inst, Microsyst Technol Ctr, Tainan 709, Taiwan
来源
JOURNAL OF DISPLAY TECHNOLOGY | 2009年 / 5卷 / 4-6期
关键词
Flexible electronics; array sensor; tactile; multiscanning; screen printing; bump; resistance; FABRICATION;
D O I
10.1109/JDT.2008.2004862
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A flexible electronics sensor for large area sensing was developed using a screen printing technology with the thixotropy sol-gel materials to form the microstructure patterns on two polyimide (PI) sheets. A flexible sensor is 150 x 150 mm(2), including posts, resistances, bumps, and electrode traces. The space between the top electrode and the resistance layer provided a buffer distance for large bending. Experimental results show that array microstructures have good morphological profiles at a screen speed of 10 mm/s, a squeegee pressure of 213 kPa, and a separation speed of 0.4 mm/s using the print-print mode. A membrane with a bump protrusion had a large displacement and a quick sensitive response because the bump provided a concentrated force of von Mises stress on the membrane center. For printing thick structures, diffusion effects and dimensional shrinkages can be reduced when a paste material with a higher viscosity is used. The results exhibit a potential for using in the flexible sensing and higher temperatures. In additional, the fabrication is the low cost and potential higher throughput in flexible electronics applications.
引用
收藏
页码:178 / 183
页数:6
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